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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A test structure to inform the effects of dielectric charging on CMOS MEMS inertial sensors

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A test structure to inform the effects of dielectric charging on CMOS MEMS inertial sensors

Dorsey, Kristen; Fedder, Gary

作者Dorsey, Kristen; Fedder, Gary
文件大小1609.25KB
发表时间2012
DOI10.1109/MEMSYS.2012.6170162
页码392-395

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