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Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-Beam Deposited Ta2O5 Films

Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-Beam Deposited Ta2O5 Films

Kulpa, A.; Jaeger, N. A. F.
  • 期刊名称Journal of the Electrochemical Society
  • 作者Kulpa, A.; Jaeger, N. A. F.
  • 卷第159卷
  • 期第12期
  • 印刷ISSN0013-4651
  • 电子ISSN1945-7111
  • 文件大小55.29KB
  • 发表时间2012-09-27
  • DOI10.1149/2.013212jes
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