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[IEEE 2012 24th International Conference on Microelectronics (ICM) - Algiers, Algeria (2012.12.16-2012.12.20)] 2012 24th International Conference on Microelectronics (ICM) - Characterization by SEM and FTIR of B-LPCVD polysilicon films after thermal oxidation

[IEEE 2012 24th International Conference on Microelectronics (ICM) - Algiers, Algeria (2012.12.16-2012.12.20)] 2012 24th International Conference on Microelectronics (ICM) - Characterization by SEM and FTIR of B-LPCVD polysilicon films after thermal oxidation

Bouzerdoum, Moufida; Birouk, Boubekeur

作者Bouzerdoum, Moufida; Birouk, Boubekeur
文件大小635.96KB
发表时间2012
DOI10.1109/ICM.2012.6471438
页码1-4

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