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[IEEE 2012 IEEE Photonics Conference (IPC) - Burlingame, CA, USA (2012.09.23-2012.09.27)] IEEE Photonics Conference 2012 - Integrated differential pressure sensor in silicon-on-insulator

[IEEE 2012 IEEE Photonics Conference (IPC) - Burlingame, CA, USA (2012.09.23-2012.09.27)] IEEE Photonics Conference 2012 - Integrated differential pressure sensor in silicon-on-insulator

Hallynck, Elewout; Bienstman, Peter

作者Hallynck, Elewout; Bienstman, Peter
文件大小1477.46KB
发表时间2012
DOI10.1109/ipcon.2012.6358684
页码445-446

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