Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition

Tang, Kun; Gu, Shulin; Ye, Jiandong; Zhu, Shunming; Huang, Shimin; Gu, Ran; Zhang, Rong; Shi, Yi; Zheng, Youdou

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Tang, Kun; Gu, Shulin; Ye, Jiandong; Zhu, Shunming; Huang, Shimin; Gu, Ran; Zhang, Rong; Shi, Yi; Zheng, Youdou
卷第30卷
期第5期
印刷ISSN0734-2101
文件大小1891.43KB
发表时间2012
DOI10.1116/1.4738949

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