A New High-Efficiency and Low-Damage Polishing Process of HgCdTe Wafer
- 期刊名称Materials and Manufacturing Processes
- 作者Li, Yan; Wanqi, Jie; Gao, Hang; Kang, Renke
- 卷第27卷
- 期第2期
- 印刷ISSN1042-6914
- 电子ISSN1532-2475
- 文件大小1003.14KB
- 发表时间2012-02
- DOI10.1080/10426914.2011.566661
- 页码229-232