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Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

Anzalone, Ruggero; D'Arrigo, Giuseppe; Camarda, Massimo; Piluso, Nicolo; Severino, Andrea; La Via, Francesco

期刊名称Materials Science Forum
作者Anzalone, Ruggero; D'Arrigo, Giuseppe; Camarda, Massimo; Piluso, Nicolo; Severino, Andrea; La Via, Francesco
卷第711卷
电子ISSN1662-9752
文件大小494.80KB
发表时间2012-1
DOI10.4028/www.scientific.net/MSF.711.51
页码51-54