Effects of substrates on the crystal structure, texturing and optical properties of AlN coatings deposited by inverted cylindrical magnetron sputtering
- 期刊名称The European Physical Journal Applied Physics
- 作者Khanna, A.; Bhat, D.G.
- 卷第59卷
- 期第3期
- DOI210.0000/journals.cambridge.org/generic-5cecb91a8754
- 印刷ISSN1286-0042
- 电子ISSN1286-0050
- 文件大小587.07KB
- 发表时间2012-10
- DOI10.1051/epjap/2012120203
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