Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk Slider
- 期刊名称Japanese Journal of Applied Physics
- 作者Pholprasit, Patama; Atthi, Nithi; Thammabut, Thawat; Jeamsaksiri, Wutthinan; Hruanun, Charndet; Poyai, Amporn; Silapunt, Rardchawadee
- 卷第51卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小522.42KB
- 发表时间2012-6-20
- DOI10.1143/JJAP.51.06FF08
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