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Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits

Kang, Joonhyun; Atsumi, Yuki; Oda, Manabu; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Arai, Shigehisa

期刊名称Japanese Journal of Applied Physics
作者Kang, Joonhyun; Atsumi, Yuki; Oda, Manabu; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Arai, Shigehisa
卷第51卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小546.35KB
发表时间2012-11-19
DOI10.1143/JJAP.51.120203