$SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Design of combined microscopical and scatterometrical imaging device of surface inspection$

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Design of combined microscopical and scatterometrical imaging device of surface inspection

Zhao, Wenjing; Hahlweg, Cornelius; Rothe, Hendrik; Hanssen, Leonard M.

作者Zhao, Wenjing; Hahlweg, Cornelius; Rothe, Hendrik; Hanssen, Leonard M.
卷第8495卷
印刷ISSN0277-786X
文件大小561.63KB
发表时间2012
DOI10.1117/12.929473

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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Design of combined microscopical and scatterometrical imaging device of surface inspection