High sensitivity acoustic wave AlN/Si mass detectors arrays for artificial olfactory and biosensing applications: A review
- 期刊名称Sensors and Actuators B: Chemical
- 作者Mastromatteo, U.; Villa, F.F.
- 卷第179卷
- 印刷ISSN0925-4005
- 文件大小689.97KB
- 发表时间2013-3
- DOI10.1016/j.snb.2012.10.033
- 页码319-327
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