PECVD based silicon oxynitride thin films for nano photonic on chip interconnects applications
- 期刊名称Micron
- 作者Satinder K. Sharma; Sumit Barthwal; Vikram Singh; Anuj Kumar; Prabhat K. Dwivedi; B. Prasad; Dinesh Kumar
- 卷第44卷
- 文件大小1486.46KB
- 发表时间2013
- DOI10.1016/j.micron.2012.08.006
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