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Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas

Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas

Diomede, Paola; Kim, Doosik; Economou, Demetre J.

期刊名称AIChE Journal
作者Diomede, Paola; Kim, Doosik; Economou, Demetre J.
卷第59卷
期第9期
印刷ISSN0001-1541
文件大小770.44KB
发表时间2013-09
DOI10.1002/aic.14053
页码3214-3222

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