Recirculating-Planar-Magnetron Simulations and Experiment
- 期刊名称IEEE Transactions on Plasma Science
- 作者Franzi, Matthew A.; Gilgenbach, Ronald M.; Hoff, Brad W.; Chalenski, David A.; Simon, David; Lau, Y. Y.; Luginsland, John
- 卷第41卷
- 期第4期
- 印刷ISSN0093-3813
- 电子ISSN1939-9375
- 文件大小849.91KB
- 发表时间2013-04
- DOI10.1109/TPS.2013.2242493
- 页码639-645
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