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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Investigation of microstructured fiber geometries by scatterometry

Hansen, Poul-Erik; Burger, Sven; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.

作者Hansen, Poul-Erik; Burger, Sven; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
卷第8789卷
印刷ISSN0277-786X
文件大小682.89KB
发表时间2013
DOI10.1117/12.2020526