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Study of Nitrogen Concentration in Silicon Carbide

Wang, Hui; Yan, Cheng-Feng; Kong, Hai-Kuan; Chen, Jian-Jun; Xin, Jun; Shi, Er-Wei; Yang, Jian-Hua

期刊名称Journal of Electronic Materials
作者Wang, Hui; Yan, Cheng-Feng; Kong, Hai-Kuan; Chen, Jian-Jun; Xin, Jun; Shi, Er-Wei; Yang, Jian-Hua
卷第42卷
期第6期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小288.98KB
发表时间2013-06
DOI10.1007/s11664-013-2503-5
页码1037-1041