Growth and characterization of group-II-alloyed ZnAlO UV-range transparent conductive films prepared by RF magnetron sputtering
- 期刊名称Vacuum
- 作者Park, Jang Ho; Cuong, Hoang Ba; Jeong, Sang Hun; Lee, Byung Teak
- 卷第97卷
- 印刷ISSN0042-207X
- 文件大小1055.76KB
- 发表时间2013-11
- DOI10.1016/j.vacuum.2013.03.013
- 页码15-19
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