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A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

Ping Zhou, Dongming Guo, Renke Kang…
  • 作者Ping Zhou, Dongming Guo, Renke Kang…
  • 卷第69卷
  • 文件大小569.55KB
  • 发表时间2013-11
  • DOI10.1007/s00170-013-5108-5
  • 页码1009-1016
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