Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime

Shihab, M; Elgendy, A T; Korolov, I; Derzsi, A; Schulze, J; Eremin, D; Mussenbrock, T; Donkó, Z; Brinkmann, R P

期刊名称Plasma Sources Science and Technology
作者Shihab, M; Elgendy, A T; Korolov, I; Derzsi, A; Schulze, J; Eremin, D; Mussenbrock, T; Donkó, Z; Brinkmann, R P
卷第22卷
期第5期
印刷ISSN0963-0252
电子ISSN1361-6595
文件大小338.11KB
发表时间2013-10-01
DOI10.1088/0963-0252/22/5/055013

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