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Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

V. A. Vasil’ev, P. S. Chernov

作者V. A. Vasil’ev, P. S. Chernov
卷第7卷
期第3期
文件大小601.73KB
发表时间2013-05
DOI10.1134/S1027451013030361
页码565-571

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