Excimer laser doping using highly doped silicon nanoparticles

Meseth, Martin; Kunert, Bernd Christian; Bitzer, Lucas; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, Martin; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils-Peter; Benson, Niels; Schmechel, Roland

期刊名称physica status solidi (a)
作者Meseth, Martin; Kunert, Bernd Christian; Bitzer, Lucas; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, Martin; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils-Peter; Benson, Niels; Schmechel, Roland
卷第210卷
期第11期
印刷ISSN1862-6300
文件大小574.89KB
发表时间2013-11
DOI10.1002/pssa.201329012
页码2456-2462

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Excimer laser doping using highly doped silicon nanoparticles