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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT/silicon crab-leg suspensions

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT/silicon crab-leg suspensions

Aktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil
  • 作者Aktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil
  • 文件大小2641.64KB
  • 发表时间2013
  • DOI10.1109/MEMSYS.2013.6474307
  • 页码576-579
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