Holographic method for topography measurement of highly tilted and high numerical aperture micro structures
- 期刊名称Optics & Laser Technology
- 作者Kozacki, Tomasz; Liżewski, Kamil; Kostencka, Julianna
- 卷第49卷
- 印刷ISSN0030-3992
- 文件大小1715.19KB
- 发表时间2013-7
- DOI10.1016/j.optlastec.2012.12.001
- 页码38-46
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