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Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

Lewin, Erik; Loch, Daniel; Montagne, Alex; Ehiasarian, Arutiun P.; Patscheider, Jörg
  • 期刊名称Surface and Coatings Technology
  • 作者Lewin, Erik; Loch, Daniel; Montagne, Alex; Ehiasarian, Arutiun P.; Patscheider, Jörg
  • 卷第232卷
  • 印刷ISSN0257-8972
  • 文件大小1061.19KB
  • 发表时间2013-10
  • DOI10.1016/j.surfcoat.2013.06.076
  • 页码680-689
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