Structural and Electrical Properties of ZnO Films Deposited with Low-Temperature Facing Targets Magnetron Sputtering (FTS) System with Changes in H₂ and O₂ Flow Rate

• 期刊名称Journal of Nanoscience and Nanotechnology
• 作者Kim, Hye Ran; Jin, Su Bong; Wen, Long; Choi, Yoon Seok; Choi, In Sik; Han, Jeon Geon
• 卷第13卷
• 期第11期
• 印刷ISSN1533-4880
• 电子ISSN1533-4899
• 文件大小1192.97KB
• 发表时间2013-11-01
• DOI10.1166/jnn.2013.7810
• 页码7745-7750