Experimental study and modeling of the effect of mixed size abrasive grits on surface topology and removal rate in wafer lapping
- 期刊名称Wear
- 作者Zhu, Xiaohai; Chung, Chunhui; Korach, Chad S.; Kao, Imin
- 卷第305卷
- 印刷ISSN0043-1648
- 文件大小6865.61KB
- 发表时间2013-07
- DOI10.1016/j.wear.2013.05.007
- 页码14-22
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