Atomic layer deposition of high-k dielectrics on carbon nanoparticles
- 期刊名称Thin Solid Films
- 作者Tamm, Aile; Peikolainen, Anna-Liisa; Kozlova, Jekaterina; Mändar, Hugo; Aidla, Aleks; Rammula, Raul; Aarik, Lauri; Roosalu, Kaspar; Lu, Jun; Hultman, Lars; Koel, Mihkel; Kukli, Kaupo; Aarik, Jaan
- 卷第538卷
- 印刷ISSN0040-6090
- 文件大小1139.32KB
- 发表时间2013-07
- DOI10.1016/j.tsf.2012.09.071
- 页码16-20
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