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Extending and Tuning the Travel Range of Microelectromechanical Actuators Using Electrically Reconfigurable Nano-Structured Electrodes

Extending and Tuning the Travel Range of Microelectromechanical Actuators Using Electrically Reconfigurable Nano-Structured Electrodes

Jain, Ankit; Alam, Muhammad Ashraful

期刊名称Journal of Microelectromechanical Systems
作者Jain, Ankit; Alam, Muhammad Ashraful
卷第22卷
期第5期
印刷ISSN1057-7157
电子ISSN1941-0158
文件大小311.71KB
发表时间2013-10
DOI10.1109/jmems.2013.2266614
页码1001-1003

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