Post-CMOS FinFET Integration of Bismuth Telluride and Antimony Telluride Thin-Film-Based Thermoelectric Devices on SoI Substrate
Aktakka, Ethem Erkan; Ghafouri, Niloufar; Smith, Casey E.; Peterson, Rebecca L.; Hussain, Muhammad Mustafa; Najafi, Khalil
- 期刊名称IEEE Electron Device Letters
- 作者Aktakka, Ethem Erkan; Ghafouri, Niloufar; Smith, Casey E.; Peterson, Rebecca L.; Hussain, Muhammad Mustafa; Najafi, Khalil
- 卷第34卷
- 期第10期
- 印刷ISSN0741-3106
- 电子ISSN1558-0563
- 文件大小976.83KB
- 发表时间2013-10
- DOI10.1109/LED.2013.2277693
- 页码1334-1336