[IEEE 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Wroclaw (2013.4.14-2013.4.17)] 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - VACNT fabrication on aluminum using “fast-heating” thermal CVD
- 作者Zhaoli Gao, ; Yuen, M. M. F.
- 文件大小744.48KB
- 发表时间2013
- DOI10.1109/EuroSimE.2013.6529955
- 页码1-6
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