[IEEE 2013 IEEE MTT-S International Microwave and RF Conference - New Delhi, India (2013.12.14-2013.12.16)] IEEE MTT-S International Microwave and RF Conference - Silicon micromachining for terahertz component development
- 作者Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran
- 文件大小402.17KB
- 发表时间2013
- DOI10.1109/imarc.2013.6777696
- 页码1-4
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