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[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Critical thickness of diamond-like carbon study using X-ray photoelectron spectroscopy depth profiling

[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Critical thickness of diamond-like carbon study using X-ray photoelectron spectroscopy depth profiling

Khamnaulthong, Nattaporn; Siangchaew, Krisda; Limsuwan, Pichet

作者Khamnaulthong, Nattaporn; Siangchaew, Krisda; Limsuwan, Pichet
文件大小184.59KB
发表时间2013
DOI10.1109/inec.2013.6465973
页码122-123

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