[IEEE 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Suzhou, China (2013.08.26-2013.08.30)] 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - The study on the effect of step time on the movement of the cross-scale stage based on the stick-slip driving
Zhong, Bowen; Wang, Zhenhua; Chen, Tao; Chen, Liguo; Sun, Lining
- 作者Zhong, Bowen; Wang, Zhenhua; Chen, Tao; Chen, Liguo; Sun, Lining
- 文件大小426.20KB
- 发表时间2013
- DOI10.1109/3m-nano.2013.6737450
- 页码357-361