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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Atomic layer deposited Al<inf>2</inf>O<inf>3</inf> and parylene C dual-layer encapsulation for biomedical implantable devices

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices

Xie, Xianzong; Rieth, Loren; Tathireddy, Prashant; Solzbacher, Florian
  • 作者Xie, Xianzong; Rieth, Loren; Tathireddy, Prashant; Solzbacher, Florian
  • 文件大小465.41KB
  • 发表时间2013
  • DOI10.1109/transducers.2013.6626949
  • 页码1044-1047
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