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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Low temperature process below 170 °C for hydrophilic and hydrophobic micro patterns

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Low temperature process below 170 °C for hydrophilic and hydrophobic micro patterns

Nakagami, C.; Tonomura, W.; Kaizuma, Y.; Konishi, S.
  • 作者Nakagami, C.; Tonomura, W.; Kaizuma, Y.; Konishi, S.
  • 文件大小759.43KB
  • 发表时间2013
  • DOI10.1109/transducers.2013.6626966
  • 页码1111-1114
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