[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Bi-layer encapsulation of utah array based nerual interfaces by atomic layer deposited Al2O3 and parylene C

• 作者Xie, Xianzong; Rieth, Loren; Cardwell, Ryan; Sharma, Rohit; Yoo, Je-Min; Diweka, Mohit; Tathireddy, Prashant; Solzbacher, Florian
• 文件大小840.55KB
• 发表时间2013
• DOI10.1109/transducers.2013.6627006
• 页码1267-1270