[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A low-temperature parylene-C-to-silicon bonding using photo-patternable adhesives and its applications
- 作者Chang, Jay Han-Chieh; Liu, Yang; Tai, Yu-Chong
- 文件大小2205.53KB
- 发表时间2013
- DOI10.1109/transducers.2013.6627244
- 页码2217-2220
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