Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
- 期刊名称Plasma Sources Science and Technology
- 作者Derzsi, A; Korolov, I; Schüngel, E; Donkó, Z; Schulze, J
- 卷第22卷
- 期第6期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小1317.15KB
- 发表时间2013-12-01
- DOI10.1088/0963-0252/22/6/065009
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