Formation of III–V-on-insulator structures on Si by direct wafer bonding

Yokoyama, Masafumi; Iida, Ryo; Ikku, Yuki; Kim, Sanghyeon; Takagi, Hideki; Yasuda, Tetsuji; Yamada, Hisashi; Ichikawa, Osamu; Fukuhara, Noboru; Hata, Masahiko; Takenaka, Mitsuru; Takagi, Shinichi

期刊名称Semiconductor Science and Technology
作者Yokoyama, Masafumi; Iida, Ryo; Ikku, Yuki; Kim, Sanghyeon; Takagi, Hideki; Yasuda, Tetsuji; Yamada, Hisashi; Ichikawa, Osamu; Fukuhara, Noboru; Hata, Masahiko; Takenaka, Mitsuru; Takagi, Shinichi
卷第28卷
期第9期
印刷ISSN0268-1242
电子ISSN1361-6641
文件大小68.06KB
发表时间2013-09-01
DOI10.1088/0268-1242/28/9/094009

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Formation of III–V-on-insulator structures on Si by direct wafer bonding