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Comparative Study on Dry Etching of α- and β-SiC Nano-Pillars

Choi, J.H.; Latu-Romain, Laurence; Bano, Edwige; Henry, Anne; Lee, Won Jae; Chevolleau, Thierry; Baron, Thierry

期刊名称Materials Science Forum
作者Choi, J.H.; Latu-Romain, Laurence; Bano, Edwige; Henry, Anne; Lee, Won Jae; Chevolleau, Thierry; Baron, Thierry
电子ISSN1662-9752
文件大小486.17KB
发表时间2013-1
DOI10.4028/www.scientific.net/MSF.740-742.817
页码817-820