Carbonization of Si Surface Using Hot-Filament CVD Equipment and Characterization of the Char Layer
- 期刊名称MRS Proceedings
- 作者Haruta, Kenichi; Kimura, Hideki; Chiba, Masafumi
- 卷第1511卷
- 电子ISSN1946-4274
- 文件大小1182.12KB
- 发表时间2013-1
- DOI10.1557/opl.2013.92
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