Leakage Current Suppression by Passivation of Defects by Anodic Oxidation of 4H-SiC Schottky Contacts
- 期刊名称Japanese Journal of Applied Physics
- 作者Kato, Masashi; Kimura, Masaya; Ichimura, Masaya
- 卷第52卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小414.40KB
- 发表时间2013-04-01
- DOI10.7567/JJAP.52.04CP02
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