Resolution Limits of Nanoimprinted Patterns by Fluorescence Microscopy
Kubo, Shoichi; Tomioka, Tatsuya; Nakagawa, Masaru
- 期刊名称Japanese Journal of Applied Physics
- 作者Kubo, Shoichi; Tomioka, Tatsuya; Nakagawa, Masaru
- 卷第52卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小603.21KB
- 发表时间2013-06-01
- DOI10.7567/JJAP.52.06GJ01