Understanding of Initial Unstable Contact Behaviors of Au-to-Au Microcontact under Low Contact Force for Micro- and Nano-Electromechanical System Devices
- 期刊名称Japanese Journal of Applied Physics
- 作者Qiu, Haodong; Wang, Hong; Ke, Feixiang
- 卷第52卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小412.41KB
- 发表时间2013-09-01
- DOI10.7567/JJAP.52.090203
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