Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Brunner, Timothy A.; Menon, Vinayan C.; Wong, Cheuk Wun; Gluschenkov, Oleg; Belyansky, Michael P.; Felix, Nelson M.; Ausschnitt, Christopher P.; Vukkadala, Pradeep; Veeraraghavan, Sathish; Sinha, Jaydeep K.
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Brunner, Timothy A.; Menon, Vinayan C.; Wong, Cheuk Wun; Gluschenkov, Oleg; Belyansky, Michael P.; Felix, Nelson M.; Ausschnitt, Christopher P.; Vukkadala, Pradeep; Veeraraghavan, Sathish; Sinha, Jaydeep K.
- 卷第12卷
- 期第4期
- 印刷ISSN1932-5150
- 文件大小11998.88KB
- 发表时间2013-10-25
- DOI10.1117/1.jmm.12.4.043002