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Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-beam Deposited Ta2O5 Films

Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-beam Deposited Ta2O5 Films

Kulpa, A.; Jaeger, N. A. F.

期刊名称ECS Transactions
作者Kulpa, A.; Jaeger, N. A. F.
卷第50卷
期第4期
印刷ISSN1938-6737
电子ISSN1938-5862
文件大小199.13KB
发表时间2013-03-15
DOI10.1149/05004.0075ecst
页码75-81

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