Optical Fourier transform based in-plane vibration characterization for MEMS comb structure
Gao, Yongfeng; Cao, Liangcai; You, Zheng; Zhao, Jiahao; Zhang, Zichen; Yang, Jianzhong
- 期刊名称Optics Express
- 作者Gao, Yongfeng; Cao, Liangcai; You, Zheng; Zhao, Jiahao; Zhang, Zichen; Yang, Jianzhong
- 卷第21卷
- 期第4期
- 电子ISSN1094-4087
- 文件大小1473.05KB
- 发表时间2013-02-25
- DOI10.1364/oe.21.005063