Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform

• 期刊名称Optics Express
• 作者Li, Qing; Eftekhar, Ali A.; Sodagar, Majid; Xia, Zhixuan; Atabaki, Amir H.; Adibi, Ali
• 卷第21卷
• 期第15期
• 电子ISSN1094-4087
• 文件大小3573.76KB
• 发表时间2013-07-29
• DOI10.1364/oe.21.018236