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Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide

Qibo, Feng; Bin, Zhang; Cunxing, Cui; Cuifang, Kuang; Yusheng, Zhai; Fenglin, You

期刊名称Optics Express
作者Qibo, Feng; Bin, Zhang; Cunxing, Cui; Cuifang, Kuang; Yusheng, Zhai; Fenglin, You
卷第21卷
期第22期
电子ISSN1094-4087
文件大小1543.87KB
发表时间2013-11-04
DOI10.1364/OE.21.025805